ʻenehana
ʻO ka epitaxy beam molecular, a i ʻole MBE, kahi ʻenehana hou no ka ulu ʻana i nā ʻili lahilahi kiʻekiʻe o nā kristal ma nā substrates kristal. I nā kūlana vacuum ultra-kiʻekiʻe, ua lako ka umu hoʻomehana me nā ʻano ʻāpana āpau e pono ai a hoʻopuka i ka mahu, ma o nā lua i hana ʻia ma hope o ka collimating beam atomic a molecular beam paha, ka injection pololei i ka mahana kūpono o ka substrate kristal hoʻokahi, e kaohi ana i ka beam molecular i ka substrate scanning i ka manawa like, hiki iā ia ke hana i nā mole a i ʻole nā atoms i loko o nā papa hoʻonohonoho kristal e hana i kahi ʻili lahilahi ma kahi substrate "ulu".
No ka hana maʻamau o nā lako MBE, pono e lawe mau ʻia ka naikokene wai maʻemaʻe kiʻekiʻe, ke kaomi haʻahaʻa a me ka naikokene wai maʻemaʻe loa i ke keʻena hoʻoluʻu o nā lako. Ma keʻano laulā, ʻo kahi pahu e hāʻawi ana i ka naikokene wai he kaomi puka ma waena o 0.3MPa a me 0.8MPa. Hiki ke hoʻoheheʻe maʻalahi ʻia ka naikokene wai ma -196 ℃ i loko o ka naikokene i ka wā o ka lawe ʻana i ka pipeline. Ke hoʻoheheʻe ʻia ka naikokene wai me ka lakio kinoea-wai ma kahi o 1:700 i loko o ka pipeline, e noho ia i kahi nui o ke kahe naikokene wai a hōʻemi i ke kahe maʻamau ma ka hopena o ka pipeline naikokene wai. Eia kekahi, i loko o ka pahu mālama naikokene wai, aia paha he mau ʻōpala i hoʻomaʻemaʻe ʻole ʻia. I loko o ka pipeline naikokene wai, ʻo ka noho ʻana o ka ea pulu e alakaʻi pū i ka hana ʻana o ka ʻōpala hau. Inā hoʻokuʻu ʻia kēia mau mea haumia i loko o nā lako, e hōʻino ia i nā lako.
No laila, lawe ʻia ka naikokene wai i loko o ka pahu mālama waho i nā lako MBE i loko o ka hale hana lepo ʻole me ka pono kiʻekiʻe, kūpaʻa a me ka maʻemaʻe, a me ke kaomi haʻahaʻa, ʻaʻohe naikokene, ʻaʻohe haumia, 24 mau hola keu ʻole, ʻo ia ʻōnaehana hoʻokele halihali he huahana kūpono.
Nā lako MBE kūlike
Mai ka makahiki 2005, ua hoʻomaikaʻi a hoʻomaikaʻi ʻo HL Cryogenic Equipment (HL CRYO) i kēia ʻōnaehana a ke hana pū nei me nā mea hana lako MBE o ka honua. Loaʻa i nā mea hana lako MBE, me DCA, REBER, nā pilina hana like me kā mākou hui. Ua hana pū nā mea hana lako MBE, me DCA lāua ʻo REBER, i nā papahana he nui.
ʻO Riber SA kahi mea hoʻolako honua alakaʻi o nā huahana molecular beam epitaxy (MBE) a me nā lawelawe pili no ka noiʻi semiconductor hui a me nā noi ʻoihana. Hiki i ka hāmeʻa Riber MBE ke waiho i nā papa lahilahi loa o ka mea ma luna o ka substrate, me nā kaohi kiʻekiʻe loa. Ua lako ʻia nā lako vacuum o HL Cryogenic Equipment (HL CRYO) me Riber SA ʻO ka lako nui loa ʻo Riber 6000 a ʻo ka mea liʻiliʻi loa ʻo Compact 21. Aia ia i ke kūlana maikaʻi a ua ʻike ʻia e nā mea kūʻai aku.
ʻO DCA ka MBE oxide alakaʻi o ka honua. Mai ka makahiki 1993, ua hoʻokō ʻia ka hoʻomohala ʻōnaehana o nā ʻenehana oxidation, ka hoʻomehana substrate antioxidant a me nā kumu antioxidant. No kēia kumu, ua koho nā keʻena hoʻokolohua alakaʻi he nui i ka ʻenehana oxide DCA. Hoʻohana ʻia nā ʻōnaehana MBE semiconductor composite a puni ka honua. ʻO ka ʻōnaehana hoʻolaha nitrogen wai VJ o HL Cryogenic Equipment (HL CRYO) a me nā lako MBE o nā hiʻohiʻona he nui o DCA he ʻike kūlike i nā papahana he nui, e like me ke kumu hoʻohālike P600, R450, SGC800 etc.
Papa Hana
| Ke Kula ʻOihana ʻenehana ʻo Shanghai, ke Kula ʻEpekema Kina |
| ʻO ka 11th Institute of China Electronics Technology Corporation |
| Ke Keʻena o nā Semiconductors, Ke Kula ʻEpekema Kina |
| Huawei |
| ʻAha Kula ʻo Alibaba DAMO |
| ʻOihana ʻenehana Powertech Inc. |
| ʻO Delta Electronics Inc. |
| ʻO Suzhou Everbright Photonics |
Ka manawa hoʻouna: Mei-26-2021