Hoʻopau ʻia ka papahana Chip MBE i nā makahiki i hala

ʻenehana

ʻO ka molecular beam epitaxy, a i ʻole MBE, he ʻenehana hou no ka ulu ʻana i nā kiʻiʻoniʻoni lahilahi kiʻekiʻe o nā kristal ma nā substrate aniani. I loko o nā kūlana maloʻo ultra-kiʻekiʻe, ua hoʻolako ʻia ka umu wela me nā ʻano mea like ʻole a hoʻoulu i ka mahu, ma o nā lua i hana ʻia ma hope o ka collimating beam atomic a i ʻole molecular beam, hoʻokomo pololei ʻia i ka mahana kūpono o ka substrate kristal hoʻokahi, e hoʻomalu ana i ka molecular beam i. ʻO ka nānā ʻana i ka substrate i ka manawa like, hiki iā ia ke hana i nā molekala a i ʻole nā ​​mana i loko o nā papa alignment kristal e hana i kahi kiʻi ʻoniʻoni ma luna o kahi substrate "ulu".

No ka hana maʻamau o nā lako MBE, pono ka hoʻomaʻemaʻe kiʻekiʻe, ka haʻahaʻa haʻahaʻa a me ka ultra-clean liquid nitrogen e hoʻomau mau ʻia a paʻa i ka lawe ʻana i ke keʻena hoʻoluʻu o nā mea hana. Ma keʻano maʻamau, ʻo kahi pahu e hāʻawi ana i ka nitrogen wai i kahi kaomi puka ma waena o 0.3MPa a me 0.8MPa. ʻO ka nitrogen wai ma -196 ℃ ua maʻalahi ka vaporized i ka nitrogen i ka wā o ka lawe ʻana i ka pipeline. Once ka wai naikokene me ka kinoea-wai lākiō o e pili ana i 1:700 ua gasified i loko o ka pipeline, e noho i ka nui o ka wai naikokene kahe kahe a hoemi i ka maʻamau kahe ma ka hope o ka wai naikokene pipeline. Eia kekahi, i loko o ka pahu hoʻopaʻa wai nitrogen, aia paha nā ʻōpala i hoʻomaʻemaʻe ʻole ʻia. I loko o ka pipeline naikokene wai, e alakaʻi ka noho ʻana o ka ea pulu i ka hana o ka hau hau. Inā hoʻokuʻu ʻia kēia mau mea haumia i loko o nā mea hana, e hoʻopōʻino ʻole ʻia i nā mea hana.

No laila, lawe ʻia ka wai nitrogen i loko o ka pahu waiho waho i nā lako MBE i ka hale hana lepo ʻole me ka hana kiʻekiʻe, kūpaʻa a me ka maʻemaʻe, a me ka haʻahaʻa haʻahaʻa, ʻaʻohe nitrogen, ʻaʻohe haumia, 24 mau hola me ka pau ʻole, ʻo ia ka ʻōnaehana hoʻokele. he huahana kūpono.

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Mea hoʻohālikelike MBE

Mai ka 2005, HL Cryogenic Equipment (HL CRYO) ke hoʻomaikaʻi a hoʻomaikaʻi i kēia ʻōnaehana a me ka hui pū ʻana me nā mea hana lako MBE honua. ʻO nā mea hana lako MBE, me DCA, REBER, he pilina pili me kā mākou hui. ʻO nā mea hana lako MBE, me DCA a me REBER, ua hui pū i nā papahana he nui.

He alakaʻi alakaʻi honua ʻo Riber SA i nā huahana molecular beam epitaxy (MBE) a me nā lawelawe e pili ana no ka noiʻi semiconductor compound a me nā noi ʻoihana. Hiki i ka mea Riber MBE ke waiho i nā ʻāpana lahilahi loa o nā mea ma ka substrate, me nā mana kiʻekiʻe loa. Ua hoʻolakoʻia nā mea hoʻonanea o HL Cryogenic Equipment (HL CRYO) me Riber SA ʻO ka mea nui loaʻo Riber 6000 aʻo ka mea liʻiliʻi loaʻo Compact 21. Aia ma ke kūlana maikaʻi a uaʻikeʻia e nā mea kūʻai.

ʻO DCA ke poʻokela o ka honua oxide MBE. Mai ka makahiki 1993, ua hoʻokō ʻia ka hoʻomohala ʻōnaehana o nā ʻenehana oxidation, ka hoʻomehana substrate antioxidant a me nā kumu antioxidant. No kēia kumu, ua koho nā hale hana alakaʻi he nui i ka ʻenehana DCA oxide. Hoʻohana ʻia nā ʻōnaehana MBE semiconductor composite a puni ka honua. ʻO ka VJ wai nitrogen circulating system o HL Cryogenic Equipment (HL CRYO) a me nā lako MBE o nā hiʻohiʻona he nui o DCA loaʻa ka ʻike pili i nā papahana he nui, e like me ke kumu hoʻohālike P600, R450, SGC800 etc.

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Papa Hana Hana

ʻO Shanghai Institute of Technical Physics, Chinese Academy of Sciences
ʻO ka 11th Institute of China Electronics Technology Corporation
Ke Kulanui o Semiconductors, Ke Kulanui o ʻEpekema Kina
Huawei
Alibaba DAMO Academy
Powertech Technology Inc.
ʻO Delta Electronics Inc.
ʻO Suzhou Everbright Photonics

Ka manawa hoʻouna: Mei-26-2021

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